User manual FGT TMFC30V 2009

[. . . ] When replacement parts are required, ensure that qualified people use replacement parts specified by FGT. Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at risk. Look-alike substitutions may result inn fire, electrical hazards or improper operation. Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being performed by qualified persons, to prevent electrical shock and personal injury. TMFC Series Installation and Operation Manual CAUTION This Instrument contains electronic components that are susceptible to damage by static electricity. [. . . ] Higher differential pressures are allowable d di d C lt f t Mounting Attitude Sensitivity ±0. . 5% maximum full scale deviation after re-zeroing. www. fgttw. com -7- www. fgttw. com -8- FGT® Model TMFC Mass Flow Controller/Meter Command Input(Fig-2/Fig-3) For Signal I/O:0~5Vdc in sub-code of "V" Type Installation and Operation Manual U-TMFC--EN Part number:0912TWAD October, 2009 FGT® Model TMFC Mass Flow Controller/Meter Output Signal(Fig-4) TMFC-Series PCB board Jumper Location & Function Installation and Operation Manual U-TMFC--EN Part number:0912TWAD October, 2009 Fig-2 For Signal I/O:4~20mAdc in sub-code of "A" Type Fig-3 Fig-4 www. fgttw. com -9- www. fgttw. com -10- FGT® Model TMFC Mass Flow Controller/Meter 4. Installation and Piping Installation and Operation Manual U-TMFC--EN Part number:0912TWAD October, 2009 FGT® Model TMFC Mass Flow Controller/Meter Installation and Operation Manual U-TMFC--EN Part number:0912TWAD October, 2009 For design and piping construction of the instrument and piping of the system including the mass flow controller, fully read the following matter and perform job with particular attention being parid. 4-2. Washing of The Piping System Fully internally wash the pipes and applications ( such as the pressure regulator, pressure gauge and stop valve) used for piping system before the application thereof. Mixing of dusts, rusts, oil and water makes and intrusion of their substances into the mass flow controller, thus causing and internal clogging, deterioration in performance and erroneous operation. . CAUTION: Never wash the piping system after incorporation of this instrument. 4-3. In-line Filter It is recommend that an In-Line be installed upstream from the controller to prevent the possibility of any foreign material entering the flow sensor or control valve. The filtering element should be replaced periodically or ultrasonically cleaned. (Auto Shutoff) prevents the valve from opening whenever the set-point is less than 2% of full scale. Permits the user to clean or replace the sensor Prevents possible damage to delicate data acquisition devices by limiting the output to -0. 7~+6. 8 Vdc on the voltage signal output and 0~26 mAdc on the current output Set-point(Command): Low Command Valve Inhibit: Removable Cleanable Sensor: Output Limiting: 4-5. Use of The conversion Tables When operating Model TMFC-Series Mass Flow controller correctly, design the piping system so that the pressure difference between the inlet and outlet. If a mass flow controller is operated on a gas other than the gas it was calibrated with, a scale shift will occur in the relationship between the output signal and the mass flow rate. This is due to the difference in heat capacities between the two gases. This scale shift can be approximated by using the ratio of the molar specific heat of the two gases. A list of sensor conversion factors is given in Table 4-1 to change to a new gas. Multiply the output reading by the ratio of the gas factor for the desired gas to the gas factor for the calibration gas. It is generally accepted that the mass flow rate derived form this equation is only accurate to ± 5%. The sensor conversion factors given in Table 4-1 are calculated based on a gas temperature of 21 and pressure of one Atmosphere. The specific heat of most gases are not strongly pressure and temperature dependent, however gas conditions that vary widely from these reference conditions may cause an additional error due to the change in specific heat due to temperature or pressure. Actual Gas Flow and Operational Pressure Calculated www. fgttw. com -13- www. fgttw. com -14- FGT® Model TMFC Mass Flow Controller/Meter Table 4-1 Conversion Factors(Nitrogen Base) Installation and Operation Manual U-TMFC--EN Part number:0912TWAD October, 2009 FGT® Model TMFC Mass Flow Controller/Meter Table 4-1 Conversion Factors(Nitrogen Base) Continued Installation and Operation Manual U-TMFC--EN Part number:0912TWAD October, 2009 www. fgttw. com -15- www. fgttw. com -16- FGT® Model TMFC Mass Flow Controller/Meter Table 4-1 Conversion Factors(Nitrogen Base) Continued Installation and Operation Manual U-TMFC--EN Part number:0912TWAD October, 2009 FGT® Model TMFC Mass Flow Controller/Meter Installation and Operation Manual U-TMFC--EN Part number:0912TWAD October, 2009 4-6. Gas Connection The standard joints of the TMFC30/50/125-Series Mass Flow Controller are 1/4" Compression (SwagelokTM) or the equivalent on both of the inlet and outlet. The standard joints of the TMFC50-Series Mass Flow Controller are 3/8" Compression (SwagelokTM) or the equivalent on both of the inlet and outlet. 4-7. Installation When designing the piping system employing the Mass Flow Controller, pay particular attention to that this instrument may have to be removed for maintenance jobs such as inspection and disassembling washing. Take into full consideration the arrangement having a space enabling easy removing and reinstallation piping jobs. During installing this instrument, pay particular attention so that no foreign matters intrude from the inlet or outlet. Hold attaching the protective caps on the both ends until the installation. Install Model TMFC-Series Mass Flow Controller in a clean-dried place in which no impacts and vibration occur. [. . . ] Or contact to us 6-2-2. Joint washing of the inlet and outlet Remove the joints for washing thereof in an environment as clean as possible so that no dusts will enter the main machine. ( With regard to the disassembling, it is difficult to warrant the initial performance. ) Connections "A" Dimensions(mm) 1/8"Compression 1/4" Compression 3/8" Compression 1/4" MVCR 126. 7 131. 3 134. 3 127. 8 TMFC125/500-Series Connections "A" Dimensions(mm) 1/4"Compression 3/8" Compression 1/2" Compression 1/4" MVCR 1/2" MVCR 148. 3 151. 3 165. 0 144. 8 154. 0 www. fgttw. com -21- www. fgttw. com -22- FGT® Model TMFC Mass Flow Controller/Meter Installation and Operation Manual U-TMFC--EN Part number:0912TWAD October, 2009 FGT® Model TMFC Mass Flow Controller/Meter Installation and Operation Manual U-TMFC--EN Part number:0912TWAD October, 2009 8. Product Warranty The warrant period shall be one (1) year after the shipment. If a malfunction of the products you purchased occurs because of our responsible reasons, it will be charge-free repaired in our factory. Any damages caused by the malfunction of the main machine can not be compensated by us. [. . . ]